Unique, cost effective SEM calibration standards, used for magnification calibration or critical dimension measurements. Can be mounted on an SEM stub.Features are high contrast chromium deposited lines for larger features and gold over chromium for features below 2.5µm to ensure optimum signal to noise ratio for calibration purposes.
Unprecedented precision over the full calibration range
All features in one single ultraflat plane
Metal on silicon with excellent signal to noise ratio
Wider range of features to accurately calibrate low, medium and high magnification ranges